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A planar bidirectional valveless peristaltic micropump for controlling biological sample fluids was designed with a very simple structure and fabricated employing MEMS technologies including deep reactive ion etching (DRIE) process in silicon, chemomechanical polishing (CMP), and silicon-glass anodic bonding. The proposed micropump was able to control the flow bidirectionally at the rate of ?12mul/min (20nl/stroke) for water and ?60mul/min (100nl/stroke) for air with an operation frequency of 10Hz at a voltage of 120Vpp. Actuation modeling of the PZT-glass actuator was performed using the CoventorWare, and the simulation results agreed well with the experimental measurements. In addition, the fabricated micropump was used in the setup for flow-type analysis and was found adequate in the electrochemical immunosensing by biocatalyzed precipitation.
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Reference：
Iron Catalysis in Organic Synthesis | Chemical Reviews,
Iron Catalysis in Organic Synthesis: A Critical Assessment of What It Takes To Make This Base Metal a Multitasking Champion